Focused Electron Beam Induced Processing, a Technology to Develop and Produce Miniaturized Electron-, IR, THz-, X-ray Sources, High Resolution Detectors and Sensors for IR-and X-ray Tomography

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ژورنال

عنوان ژورنال: Procedia Engineering

سال: 2012

ISSN: 1877-7058

DOI: 10.1016/j.proeng.2012.09.431