Focused Electron Beam Induced Processing, a Technology to Develop and Produce Miniaturized Electron-, IR, THz-, X-ray Sources, High Resolution Detectors and Sensors for IR-and X-ray Tomography
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2012
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.09.431